Inventor
AKENO KIMINOBU
JP13 patents
⚠️ This page may combine multiple inventors who share the name “AKENO KIMINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
7 patentsUS8847178B2Sep 30, 2014
Charged particle beam writing apparatus and charged particle beam writing method
NUFLARE TECHNOLOGY INC4 citations71
US10373793B2Aug 6, 2019
Conductive contact point pin and charged particle beam apparatus
NUFLARE TECHNOLOGY INC2 citations70
US11266999B2Mar 8, 2022
Dust-collecting apparatus
NUFLARE TECHNOLOGY INC0 citations62
US12537160B2Jan 27, 2026
Beam detector, multi charged particle beam irradiation apparatus, and beam detector adjustment method
NUFLARE TECHNOLOGY INC0 citations58
US11049688B2Jun 29, 2021
Charged particle beam irradiation apparatus
NUFLARE TECHNOLOGY INC0 citations49
US8987683B2Mar 24, 2015
Charged particle beam drawing apparatus and charged particle beam drawing method
NUFLARE TECHNOLOGY INC1 citations48
US10607810B2Mar 31, 2020
Vibration control system and optical equipment equipped therewith
NUFLARE TECHNOLOGY INC0 citations37
TOSHIBA KK
5 patentsUS7075621B2Jul 11, 2006
Alignment method
TOSHIBA KK8 citations72
US6901314B2May 31, 2005
Alignment apparatus for substrates
TOSHIBA KK10 citations72
US5602645AFeb 11, 1997
Pattern evaluation apparatus and a method of pattern evaluation
TOSHIBA KK12 citations72
US6617592B2Sep 9, 2003
Charged particle beam system and chamber of charged particle beam system
TOSHIBA KK1 citations51
US7528393B2May 5, 2009
Charged particle beam processing apparatus
TOSHIBA KK1 citations50