Inventor

IDENO KEITA

JP4 patents

Patents

4 patents

US11049688B2Jun 29, 2021

Charged particle beam irradiation apparatus

NUFLARE TECHNOLOGY INC0 citations49

US10867769B2Dec 15, 2020

Vacuum apparatus and charged particle beam writing apparatus

NUFLARE TECHNOLOGY INC0 citations44

US9466465B2Oct 11, 2016

Charged particle beam drawing apparatus

NUFLARE TECHNOLOGY INC0 citations42

US10607810B2Mar 31, 2020

Vibration control system and optical equipment equipped therewith

NUFLARE TECHNOLOGY INC0 citations37