Inventor
VANSLETTE DANIEL S
US21 patents
⚠️ This page may combine multiple inventors who share the name “VANSLETTE DANIEL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
12 patentsUS8791016B2Jul 29, 2014
Through silicon via wafer, contacts and design structures
IBM20 citations92
US8021943B2Sep 20, 2011
Simultaneously formed isolation trench and through-box contact for silicon-on-insulator technology
IBM22 citations92
US10147839B2Dec 4, 2018
Method of forming a metal silicide transparent conductive electrode
IBM2 citations73
US6245668B1Jun 12, 2001
Sputtered tungsten diffusion barrier for improved interconnect robustness
IBM14 citations72
US6762121B2Jul 13, 2004
Method of forming refractory metal contact in an opening, and resulting structure
IBM2 citations63
US11195969B2Dec 7, 2021
Method of forming a metal silicide transparent conductive electrode
IBM0 citations62
US11056610B2Jul 6, 2021
Method of forming a metal silicide transparent conductive electrode
IBM0 citations62
US8003536B2Aug 23, 2011
Electromigration resistant aluminum-based metal interconnect structure
IBM2 citations62
US9455214B2Sep 27, 2016
Wafer frontside-backside through silicon via
IBM2 citations60
US9245850B2Jan 26, 2016
Through silicon via wafer, contacts and design structures
IBM0 citations51
US6838364B2Jan 4, 2005
Sputtered tungsten diffusion barrier for improved interconnect robustness
IBM0 citations51
US6900505B2May 31, 2005
Method of forming refractory metal contact in an opening, and resulting structure
IBM0 citations48