Inventor
MATSUHASHI TAKAFUMI
JP4 patents
Patents
4 patentsUS11086286B2Aug 10, 2021
Substrate processing system, substrate processing method, and control program
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US11908712B2Feb 20, 2024
Semiconductor manufacturing apparatus, substrate transfer method, and program
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US11127615B2Sep 21, 2021
Substrate processing system and substrate transfer method
TOKYO ELECTRON LTD1 citations59
US12062559B2Aug 13, 2024
Substrate processing system, substrate processing method, and control program
TOKYO ELECTRON LTD0 citations49