Inventor

HUANG TER-CHANG

TW2 patents

Patents

2 patents

US7514287B2Apr 7, 2009

Method of forming a cavity by two-step etching and method of reducing dimension of a MEMS device

TOUCH MICRO SYSTEM TECH17 citations80

US7392687B2Jul 1, 2008

Method of calibrating zero offset of a pressure sensor

TOUCH MICRO SYSTEM TECH13 citations80