Inventor
HAN MIN SUNG
KR6 patents
Patents
6 patentsUS10197333B2Feb 5, 2019
Method and apparatus for drying substrate
SEMES CO LTD14 citations83
US12237151B2Feb 25, 2025
Apparatus and method for processing substrate using plasma
SEMES CO LTD0 citations59
US10964557B2Mar 30, 2021
Substrate processing apparatus and substrate processing method
SEMES CO LTD1 citations59
US12176185B2Dec 24, 2024
Apparatus and method for processing substrate using plasma
SEMES CO LTD1 citations58
US11978654B2May 7, 2024
Substrate processing apparatus
SEMES CO LTD0 citations55
US11167326B2Nov 9, 2021
Substrate processing apparatus and nozzle unit
SEMES CO LTD0 citations49