Inventor

BURKHART VINCE

US14 patents

⚠️ This page may combine multiple inventors who share the name “BURKHART VINCE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LAM RES CORP

9 patents

US11264207B2Mar 1, 2022

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

LAM RES CORP8 citations85

US11469084B2Oct 11, 2022

High temperature RF connection with integral thermal choke

LAM RES CORP6 citations83

US10373794B2Aug 6, 2019

Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber

LAM RES CORP9 citations79

US10043636B2Aug 7, 2018

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

LAM RES CORP3 citations73

US11189452B2Nov 30, 2021

Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber

LAM RES CORP1 citations68

US11784027B2Oct 10, 2023

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

LAM RES CORP0 citations62

US12283451B2Apr 22, 2025

Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber

LAM RES CORP0 citations58

US10636624B2Apr 28, 2020

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

LAM RES CORP0 citations52

US10373805B2Aug 6, 2019

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

LAM RES CORP0 citations52

APPLIED MATERIALS INC

4 patents

US6053756AApr 25, 2000

FREEBORN MARTIN

1 patent

US9111733B2Aug 18, 2015

Plasma ignition performance for low pressure physical vapor deposition (PVD) processes

FREEBORN MARTIN1 citations36

BURKHART VINCE

LAM RES CORP

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

High temperature RF connection with integral thermal choke

Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

Apparatuses and methods for avoiding electrical breakdown from RF terminal to adjacent non-RF terminal

APPLIED MATERIALS INC

Interlock safety device

Conductive feedthrough for a ceramic body and method of fabricating same

Method and apparatus for sputter etch conditioning a ceramic body

Method and apparatus for sputter etch conditioning a ceramic body

FREEBORN MARTIN

Plasma ignition performance for low pressure physical vapor deposition (PVD) processes