Inventor
Ramsayer Christopher
US6 patents
Patents
6 patentsUS10373794B2Aug 6, 2019
Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber
LAM RES CORP9 citations79
US11189452B2Nov 30, 2021
Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber
LAM RES CORP1 citations68
US10704149B2Jul 7, 2020
Defect control and stability of DC bias in RF plasma-based substrate processing systems using molecular reactive purge gas
LAM RES CORP2 citations68
US12283451B2Apr 22, 2025
Systems and methods for filtering radio frequencies from a signal of a thermocouple and controlling a temperature of an electrode in a plasma chamber
LAM RES CORP0 citations58
US12522927B2Jan 13, 2026
DC bias circuit and gas delivery system for substrate processing systems
LAM RES CORP0 citations57
US11488810B2Nov 1, 2022
Showerhead shroud
LAM RES CORP0 citations45