Inventor
DIERICHS MARCEL MATHIJS THEODORUS
NL3 patents
Patents
3 patentsUS7733459B2Jun 8, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV66 citations97
US7528929B2May 5, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV46 citations95
US7491661B2Feb 17, 2009
Device manufacturing method, top coat material and substrate
ASML NETHERLANDS BV0 citations50