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Inventor
RATHNASINGHE HIRAN RAJITHA
US
3 patents
Patents
3 patents
US12237154B2
Feb 25, 2025
Bottom and middle edge rings
LAM RES CORP
0 citations
53
US12183554B2
Dec 31, 2024
Bottom and middle edge rings
LAM RES CORP
1 citations
53
US12230482B2
Feb 18, 2025
Moveable edge ring designs
LAM RES CORP
0 citations
47