Inventor

BARNES GREGG

US2 patents

⚠️ This page may combine multiple inventors who share the name “BARNES GREGG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BREWER SCIENCE INC

1 patent

US5281690AJan 25, 1994

Base-soluble polyimide release layers for use in microlithographic processing

BREWER SCIENCE INC62 citations93

FLAIM TONY

1 patent

US5057399AOct 15, 1991

Method for making polyimide microlithographic compositions soluble in alkaline media

FLAIM TONY40 citations87