Inventor
WAKAO KAZUTOSHI
JP5 patents
⚠️ This page may combine multiple inventors who share the name “WAKAO KAZUTOSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MITSUBISHI ELECTRIC CORP
3 patentsUS6649969B2Nov 18, 2003
Nonvolatile semiconductor device
MITSUBISHI ELECTRIC CORP12 citations72
US6472700B2Oct 29, 2002
Semiconductor device with isolation insulator, interlayer insulation film, and a sidewall coating film
MITSUBISHI ELECTRIC CORP10 citations72
US6174783B1Jan 16, 2001
Semiconductor device having a improved trench structure manufacturing method thereof, and semiconductor device manufacturing apparatus
MITSUBISHI ELECTRIC CORP5 citations59