Inventor

PARTRIDGE AARON

US138 patents

⚠️ This page may combine multiple inventors who share the name “PARTRIDGE AARON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PARTRIDGE AARON

BOSCH GMBH ROBERT

Frequency and/or phase compensated microelectromechanical oscillator

Temperature compensation for silicon MEMS resonator

Method of fabricating microelectromechanical systems and devices having trench isolated contacts

MEMS resonator array structure and method of operating and using same

Temperature compensation for silicon MEMS resonator

Method for adjusting the frequency of a MEMS resonator

Microelectromechanical systems and devices having thin film encapsulated mechanical structures

Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems

Episeal pressure sensor and method for making an episeal pressure sensor

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Integrated getter area for wafer level encapsulated microelectromechanical systems

Temperature compensation for silicon MEMS resonator

Temperature controlled MEMS resonator and method for controlling resonator frequency

Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same

Frequency and/or phase compensated microelectromechanical oscillator

Episeal pressure sensor

Frequency and/or phase compensated microelectromechanical oscillator

Frequency and/or phase compensated microelectromechanical oscillator

Temperature controlled MEMS resonator and method for controlling resonator frequency

Temperature controlled MEMS resonator and method for controlling resonator frequency

Frequency and/or phase compensated microelectromechanical oscillator

Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems

Frequency and/or phase compensated microelectromechanical oscillator

Method for adjusting the frequency of a MEMS resonator

Microelectromechanical resonator structure, and method of designing, operating and using same

Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems

Gap tuning for surface micromachined structures in an epitaxial reactor

Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed and methods for fabricating same

MEMS resonator array structure

Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same

Microelectromechanical systems having stored charge and methods for fabricating and using same

Microelectromechanical systems having trench isolated contacts, and methods for fabricating same

Breath-mode ring resonator structure, and method of designing, operating and using same

Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same

Microelectromechanical systems, and devices having thin film encapsulated mechanical structures

Tire pressure and parameter monitoring system and method using accelerometers

SITIME CORP

Microelectromechanical oscillator having temperature measurement system, and method of operating same

Stacked-die MEMS resonator system

MEMS device with micromachined thermistor

Low-profile stacked-die MEMS resonator system

Resonator electrode shields

Stacked die package for MEMS resonator system

Stacked die package for MEMS resonator system

Resonator electrode shields

Temperature measurement system having a plurality of microelectromechanical resonators and method of operating same

Microelectromechanical oscillator and method of operating same

High resolution temperature sensor

UNIV LELAND STANFORD JUNIOR

In-plane micromachined accelerometer and bridge circuit having same

Method of making a nanogap for variable capacitive elements, and device having a nanogap

PARTRIDGE AARON

Wafer encapsulated microelectromechanical structure and method of manufacturing same