Inventor

LUTZ MARKUS

US148 patents

⚠️ This page may combine multiple inventors who share the name “LUTZ MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

LUTZ MARKUS

BOSCH GMBH ROBERT

Frequency and/or phase compensated microelectromechanical oscillator

Temperature compensation for silicon MEMS resonator

Method of fabricating microelectromechanical systems and devices having trench isolated contacts

Rotary speed sensor

Rate-of-rotation sensor

MEMS resonator array structure and method of operating and using same

Temperature compensation for silicon MEMS resonator

Method for adjusting the frequency of a MEMS resonator

Microelectromechanical systems and devices having thin film encapsulated mechanical structures

Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems

Episeal pressure sensor and method for making an episeal pressure sensor

SI wafer-cap wafer bonding method using local laser energy, device produced by the method, and system used in the method

Micromechanical rate of rotation sensor having ring with drive element and detection element

Process for manufacturing a sensor

Anti-stiction technique for electromechanical systems and electromechanical device employing same

Rotation speed sensor

Wafer stack and method of producing sensors

Integrated getter area for wafer level encapsulated microelectromechanical systems

Temperature compensation for silicon MEMS resonator

Temperature controlled MEMS resonator and method for controlling resonator frequency

Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same

Integrated pressure sensor

Process for producing a speed of rotation coriolis sensor

Angular velocity sensor with built-in limit stops

Rotational rate sensor with two acceleration sensors

Acceleration sensor

Rotation rate sensor

Acceleration sensor

Method of producing acceleration sensors

Sensor comprising multilayer substrate

Micromechanical comb structure

Frequency and/or phase compensated microelectromechanical oscillator

Episeal pressure sensor

Frequency and/or phase compensated microelectromechanical oscillator

Frequency and/or phase compensated microelectromechanical oscillator

Temperature controlled MEMS resonator and method for controlling resonator frequency

Temperature controlled MEMS resonator and method for controlling resonator frequency

Frequency and/or phase compensated microelectromechanical oscillator

Method for adjusting the frequency of a MEMS resonator

Frequency and/or phase compensated microelectromechanical oscillator

Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems

Microelectromechanical resonator structure, and method of designing, operating and using same

Anti-stiction technique for thin film and wafer-bonded encapsulated microelectromechanical systems

Gap tuning for surface micromachined structures in an epitaxial reactor

Decoupled multi-disk gyroscope

SITIME CORP

Microelectromechanical oscillator having temperature measurement system, and method of operating same

Stacked-die MEMS resonator system

Low-profile stacked-die MEMS resonator system

Stacked die package for MEMS resonator system

GMBH ROBERT BOSCH

Acceleration sensor