Inventor

KRONMUELLER SILVIA

DE28 patents

⚠️ This page may combine multiple inventors who share the name “KRONMUELLER SILVIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KRONMUELLER SILVIA

BOSCH GMBH ROBERT

Method of fabricating microelectromechanical systems and devices having trench isolated contacts

Microelectromechanical systems and devices having thin film encapsulated mechanical structures

Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same

Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed and methods for fabricating same

Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same

Microelectromechanical systems having trench isolated contacts, and methods for fabricating same

Anchors for microelectromechanical systems having an SOI substrate, and method of fabricating same

Microelectromechanical systems, and devices having thin film encapsulated mechanical structures

Micromechanical component and suitable method for its manufacture

Method of fabricating electromechanical device having a controlled atmosphere

Micromechanical component and corresponding method for its manufacture

Microelectromechanical systems encapsulation process with anti-stiction coating

Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics

Microelectromechanical systems encapsulation process

Microelectromechanical systems encapsulation process

Micromechanical component

Method for producing a micromechanical component having a thin-layer capping

Electromechanical system having a controlled atmosphere, and method of fabricating same

Component including a fixed element that is in a silicon layer and is mechanically connected to a substrate via an anchoring element and method for its manufacture

Semiconductor device with embedded converter element and production method for a semiconductor device with an embedded converter element

PARTRIDGE AARON

Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same

Electromechanical system having a controlled atmosphere, and method of fabricating same

Microelectromechanical device including an encapsulation layer of which a portion is removed to expose a substantially planar surface having a portion that is disposed outside and above a chamber and including a field region on which integrated circuits are formed, and methods for fabricating same

Crack and residue free conformal deposited silicon oxide with predictable and uniform etching characteristics

LAMMEL GERHARD

Method for producing a silicon substrate having modified surface properties and a silicon substrate of said type

Method for manufacturing a semiconductor structure, and a corresponding Semiconductor Structure

REICHENBACH FRANK

Method for producing a capping wafer for a sensor

LAERMER FRANZ

Method for etching a layer on a substrate