Inventor
MARIAM THEODROS W
US3 patents
Patents
3 patentsUS6010916AJan 4, 2000
Method for improving semiconductor wafer processing
ADVANCED MICRO DEVICES INC9 citations70
US5944038AAug 31, 1999
Wafer restraining device
ADVANCED MICRO DEVICES INC9 citations70
US6472326B1Oct 29, 2002
Reliable particle removal following a process chamber wet clean
ADVANCED MICRO DEVICES INC7 citations67