Inventor

VAN DIJCK HENDRIKUS ALPHONSUS

NL2 patents

Patents

2 patents

US7379154B2May 27, 2008

Lithographic apparatus, device manufacturing methods, mask and method of characterizing a mask and/or pellicle

ASML NETHERLANDS BV9 citations77

US7221430B2May 22, 2007

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV9 citations71