Inventor

POZHINSKAYA IRINA I

US2 patents

⚠️ This page may combine multiple inventors who share the name “POZHINSKAYA IRINA I”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML HOLDING NV

1 patent

US7633689B2Dec 15, 2009

Catadioptric optical system for scatterometry

ASML HOLDING NV11 citations75

SHMAREV YEVGENIY KONSTANITINOVICH

1 patent

US8107173B2Jan 31, 2012

Catadioptric optical system for scatterometry

SHMAREV YEVGENIY KONSTANITINOVICH0 citations35