Inventor
JOHANSSON NILS
US44 patents
⚠️ This page may combine multiple inventors who share the name “JOHANSSON NILS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
28 patentsUS6537133B1Mar 25, 2003
Method for in-situ endpoint detection for chemical mechanical polishing operations
APPLIED MATERIALS INC161 citations99
US7097537B1Aug 29, 2006
Determination of position of sensor measurements during polishing
APPLIED MATERIALS INC81 citations98
US6719818B1Apr 13, 2004
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
APPLIED MATERIALS INC92 citations98
US6399501B2Jun 4, 2002
Method and apparatus for detecting polishing endpoint with optical monitoring
APPLIED MATERIALS INC93 citations98
US6975107B2Dec 13, 2005
Eddy current sensing of metal removal for chemical mechanical polishing
APPLIED MATERIALS INC35 citations96
US6966816B2Nov 22, 2005
Integrated endpoint detection system with optical and eddy current monitoring
APPLIED MATERIALS INC45 citations96
US6924641B1Aug 2, 2005
Method and apparatus for monitoring a metal layer during chemical mechanical polishing
APPLIED MATERIALS INC63 citations96
US6876454B1Apr 5, 2005
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
APPLIED MATERIALS INC44 citations96
US7229340B2Jun 12, 2007
Monitoring a metal layer during chemical mechanical polishing
APPLIED MATERIALS INC15 citations93
US7008296B2Mar 7, 2006
Data processing for monitoring chemical mechanical polishing
APPLIED MATERIALS INC27 citations93
US7001246B2Feb 21, 2006
Method and apparatus for monitoring a metal layer during chemical mechanical polishing
APPLIED MATERIALS INC20 citations93
US6878038B2Apr 12, 2005
Combined eddy current sensing and optical monitoring for chemical mechanical polishing
APPLIED MATERIALS INC40 citations93
US6811466B1Nov 2, 2004
System and method for in-line metal profile measurement
APPLIED MATERIALS INC21 citations93
US7513818B2Apr 7, 2009
Polishing endpoint detection system and method using friction sensor
APPLIED MATERIALS INC41 citations92
US6831742B1Dec 14, 2004
Monitoring substrate processing using reflected radiation
APPLIED MATERIALS INC17 citations92
US6945845B2Sep 20, 2005
Chemical mechanical polishing apparatus with non-conductive elements
APPLIED MATERIALS INC20 citations91
US6535779B1Mar 18, 2003
Apparatus and method for endpoint control and plasma monitoring
APPLIED MATERIALS INC41 citations87
US8342906B2Jan 1, 2013
Friction sensor for polishing system
APPLIED MATERIALS INC6 citations84
US7682221B2Mar 23, 2010
Integrated endpoint detection system with optical and eddy current monitoring
APPLIED MATERIALS INC12 citations84
US7500901B2Mar 10, 2009
Data processing for monitoring chemical mechanical polishing
APPLIED MATERIALS INC13 citations84
US7195536B2Mar 27, 2007
Integrated endpoint detection system with optical and eddy current monitoring
APPLIED MATERIALS INC10 citations84
US7008297B2Mar 7, 2006
Combined eddy current sensing and optical monitoring for chemical mechanical polishing
APPLIED MATERIALS INC13 citations84
US6878036B2Apr 12, 2005
Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal
APPLIED MATERIALS INC11 citations79
US6930478B2Aug 16, 2005
Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal
APPLIED MATERIALS INC7 citations74
US8795029B2Aug 5, 2014
Apparatus and method for in-situ endpoint detection for semiconductor processing operations
APPLIED MATERIALS INC2 citations63
US8758086B2Jun 24, 2014
Friction sensor for polishing system
APPLIED MATERIALS INC2 citations63
US7775852B2Aug 17, 2010
Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations
APPLIED MATERIALS INC1 citations63
US7101254B2Sep 5, 2006
System and method for in-line metal profile measurement
APPLIED MATERIALS INC5 citations63
BAE SYSTEMS BOFORS AB
4 patentsUS7066093B2Jun 27, 2006
Modular warhead for units of ammunition such as missiles
BAE SYSTEMS BOFORS AB27 citations92
US7156024B2Jan 2, 2007
Device for warhead charges for cargo ammunition units
BAE SYSTEMS BOFORS AB8 citations70
US7127995B2Oct 31, 2006
Device for adapting a unit of ammunition for different types of targets and situations
BAE SYSTEMS BOFORS AB5 citations62
US7392745B2Jul 1, 2008
Device for combating targets
BAE SYSTEMS BOFORS AB0 citations52
BOFORS DEFENCE AB
3 patentsUS6966265B2Nov 22, 2005
Unit of ammunition with one or more warhead casings
BOFORS DEFENCE AB16 citations83
US6899032B2May 31, 2005
Device to enable targets to be combated by a shaped charge function
BOFORS DEFENCE AB9 citations73
US7213517B2May 8, 2007
Device for a proximity-fuzed unit ammunition
BOFORS DEFENCE AB0 citations51
JOHANSSON NILS
3 patentsUS8686330B2Apr 1, 2014
Shell arranged with extensible wings and guiding device
JOHANSSON NILS2 citations60
US8656824B2Feb 25, 2014
Shell designed for securing in a mortar and mortar designed for such a shell
JOHANSSON NILS0 citations50
US8410413B2Apr 2, 2013
Method of varying firing range and effect in target for shell and shell configured for this purpose
JOHANSSON NILS0 citations39