P

Inventor

JOHANSSON NILS

US44 patents
⚠️ This page may combine multiple inventors who share the name “JOHANSSON NILS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED MATERIALS INC

28 patents
US6537133B1Mar 25, 2003

Method for in-situ endpoint detection for chemical mechanical polishing operations

APPLIED MATERIALS INC161 citations99
US7097537B1Aug 29, 2006

Determination of position of sensor measurements during polishing

APPLIED MATERIALS INC81 citations98
US6719818B1Apr 13, 2004

Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations

APPLIED MATERIALS INC92 citations98
US6399501B2Jun 4, 2002

Method and apparatus for detecting polishing endpoint with optical monitoring

APPLIED MATERIALS INC93 citations98
US6975107B2Dec 13, 2005

Eddy current sensing of metal removal for chemical mechanical polishing

APPLIED MATERIALS INC35 citations96
US6966816B2Nov 22, 2005

Integrated endpoint detection system with optical and eddy current monitoring

APPLIED MATERIALS INC45 citations96
US6924641B1Aug 2, 2005

Method and apparatus for monitoring a metal layer during chemical mechanical polishing

APPLIED MATERIALS INC63 citations96
US6876454B1Apr 5, 2005

Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations

APPLIED MATERIALS INC44 citations96
US7229340B2Jun 12, 2007

Monitoring a metal layer during chemical mechanical polishing

APPLIED MATERIALS INC15 citations93
US7008296B2Mar 7, 2006

Data processing for monitoring chemical mechanical polishing

APPLIED MATERIALS INC27 citations93
US7001246B2Feb 21, 2006

Method and apparatus for monitoring a metal layer during chemical mechanical polishing

APPLIED MATERIALS INC20 citations93
US6878038B2Apr 12, 2005

Combined eddy current sensing and optical monitoring for chemical mechanical polishing

APPLIED MATERIALS INC40 citations93
US6811466B1Nov 2, 2004

System and method for in-line metal profile measurement

APPLIED MATERIALS INC21 citations93
US7513818B2Apr 7, 2009

Polishing endpoint detection system and method using friction sensor

APPLIED MATERIALS INC41 citations92
US6831742B1Dec 14, 2004

Monitoring substrate processing using reflected radiation

APPLIED MATERIALS INC17 citations92
US6945845B2Sep 20, 2005

Chemical mechanical polishing apparatus with non-conductive elements

APPLIED MATERIALS INC20 citations91
US6535779B1Mar 18, 2003

Apparatus and method for endpoint control and plasma monitoring

APPLIED MATERIALS INC41 citations87
US8342906B2Jan 1, 2013

Friction sensor for polishing system

APPLIED MATERIALS INC6 citations84
US7682221B2Mar 23, 2010

Integrated endpoint detection system with optical and eddy current monitoring

APPLIED MATERIALS INC12 citations84
US7500901B2Mar 10, 2009

Data processing for monitoring chemical mechanical polishing

APPLIED MATERIALS INC13 citations84
US7195536B2Mar 27, 2007

Integrated endpoint detection system with optical and eddy current monitoring

APPLIED MATERIALS INC10 citations84
US7008297B2Mar 7, 2006

Combined eddy current sensing and optical monitoring for chemical mechanical polishing

APPLIED MATERIALS INC13 citations84
US6878036B2Apr 12, 2005

Apparatus for monitoring a metal layer during chemical mechanical polishing using a phase difference signal

APPLIED MATERIALS INC11 citations79
US6930478B2Aug 16, 2005

Method for monitoring a metal layer during chemical mechanical polishing using a phase difference signal

APPLIED MATERIALS INC7 citations74
US8795029B2Aug 5, 2014

Apparatus and method for in-situ endpoint detection for semiconductor processing operations

APPLIED MATERIALS INC2 citations63
US8758086B2Jun 24, 2014

Friction sensor for polishing system

APPLIED MATERIALS INC2 citations63
US7775852B2Aug 17, 2010

Apparatus and method for in-situ endpoint detection for chemical mechanical polishing operations

APPLIED MATERIALS INC1 citations63
US7101254B2Sep 5, 2006

System and method for in-line metal profile measurement

APPLIED MATERIALS INC5 citations63

BAE SYSTEMS BOFORS AB

4 patents

BOFORS DEFENCE AB

3 patents

JOHANSSON NILS

3 patents

BOFORS AB

2 patents

(unassigned)

1 patent

VATTENFALL UTVECKLING AB

1 patent

BIRANG MANOOCHER

1 patent

ABB RESEARCH LTD

1 patent