Inventor
WATANABE J
US5 patents
Patents
5 patentsUS8945414B1Feb 3, 2015
Oxide removal by remote plasma treatment with fluorine and oxygen radicals
INTERMOLECULAR INC93 citations94
US9245793B2Jan 26, 2016
Plasma treatment of low-K surface to improve barrier deposition
INTERMOLECULAR INC5 citations71
US8901677B2Dec 2, 2014
Nucleation interface for high-k layer on germanium
INTERMOLECULAR INC2 citations60
US8987143B2Mar 24, 2015
Hydrogen plasma cleaning of germanium oxide surfaces
INTERMOLECULAR INC1 citations50
US9312137B2Apr 12, 2016
Reduction of native oxides by annealing in reducing gas or plasma
INTERMOLECULAR INC0 citations48