Inventor
CARLSSON INGEMAR
US29 patents
⚠️ This page may combine multiple inventors who share the name “CARLSSON INGEMAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
21 patentsUS7097537B1Aug 29, 2006
Determination of position of sensor measurements during polishing
APPLIED MATERIALS INC81 citations98
US9281253B2Mar 8, 2016
Determination of gain for eddy current sensor
APPLIED MATERIALS INC28 citations94
US7444198B2Oct 28, 2008
Determining physical property of substrate
APPLIED MATERIALS INC17 citations92
US9636797B2May 2, 2017
Adjusting eddy current measurements
APPLIED MATERIALS INC11 citations84
US9205527B2Dec 8, 2015
In-situ monitoring system with monitoring of elongated region
APPLIED MATERIALS INC7 citations84
US7952708B2May 31, 2011
High throughput measurement system
APPLIED MATERIALS INC13 citations84
US7840375B2Nov 23, 2010
Methods and apparatus for generating a library of spectra
APPLIED MATERIALS INC12 citations84
US9754846B2Sep 5, 2017
Inductive monitoring of conductive trench depth
APPLIED MATERIALS INC5 citations83
US12320883B2Jun 3, 2025
Resistivity-based adjustment of thresholds for in-situ monitoring
APPLIED MATERIALS INC1 citations74
US7746485B2Jun 29, 2010
Determining physical property of substrate
APPLIED MATERIALS INC6 citations74
US11199605B2Dec 14, 2021
Resistivity-based adjustment of measurements from in-situ monitoring
APPLIED MATERIALS INC1 citations73
US11079459B2Aug 3, 2021
Resistivity-based calibration of in-situ electromagnetic inductive monitoring
APPLIED MATERIALS INC1 citations73
US10556315B2Feb 11, 2020
Determination of gain for eddy current sensor
APPLIED MATERIALS INC1 citations73
US10103073B2Oct 16, 2018
Inductive monitoring of conductive trench depth
APPLIED MATERIALS INC3 citations72
US9472475B2Oct 18, 2016
Feedback control using detection of clearance and adjustment for uniform topography
APPLIED MATERIALS INC2 citations63
US8014004B2Sep 6, 2011
Determining physical property of substrate
APPLIED MATERIALS INC4 citations63
US10207386B2Feb 19, 2019
Determination of gain for eddy current sensor
APPLIED MATERIALS INC1 citations62
US10589397B2Mar 17, 2020
Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing
APPLIED MATERIALS INC1 citations61
US10427272B2Oct 1, 2019
Endpoint detection with compensation for filtering
APPLIED MATERIALS INC0 citations52
US10741459B2Aug 11, 2020
Inductive monitoring of conductive loops
APPLIED MATERIALS INC0 citations51
US9275917B2Mar 1, 2016
Determination of gain for eddy current sensor
APPLIED MATERIALS INC0 citations41