Inventor
PIERCE KEITH G
US7 patents
⚠️ This page may combine multiple inventors who share the name “PIERCE KEITH G”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
RODEL INC
4 patentsUS5860848AJan 19, 1999
Polishing silicon wafers with improved polishing slurries
RODEL INC99 citations96
US6699299B2Mar 2, 2004
Composition and method for polishing in metal CMP
RODEL INC34 citations90
US6616717B2Sep 9, 2003
Composition and method for polishing in metal CMP
RODEL INC28 citations90
US6693035B1Feb 17, 2004
Methods to control film removal rates for improved polishing in metal CMP
RODEL INC12 citations71