Inventor
CHO GUEY-SHYUNG
TW3 patents
Patents
3 patentsUS6435865B1Aug 20, 2002
Apparatus and method for positioning gas injectors in a vertical furnace
TAIWAN SEMICONDUCTOR MFG529 citations96
US6340933B1Jan 22, 2002
Semiconductor wafer transport pod having cover latch indicator
TAIWAN SEMICONDUCTOR MFG45 citations91
US6168427B1Jan 2, 2001
Apparatus for guiding the removal of a processing tube from a semiconductor furnace
TAIWAN SEMICONDUCTOR MFG22 citations91