Inventor
KWON OHYEOL
KR11 patents
Patents
11 patentsUS11158079B2Oct 26, 2021
Substrate treating apparatus and apparatus and method for eccentricity inspection
SEMES CO LTD4 citations71
US11367634B2Jun 21, 2022
Substrate treating apparatus with edge treating unit and substrate treating method
SEMES CO LTD2 citations70
US12290876B2May 6, 2025
Film removing method, substrate treating method, and substrate treating apparatus
SEMES CO LTD0 citations60
US11869763B2Jan 9, 2024
Apparatus and system for treating substrate
SEMES CO LTD0 citations59
US11679447B2Jun 20, 2023
Apparatus and method for treating substrate
SEMES CO LTD0 citations59
US12112960B2Oct 8, 2024
Apparatus for processing substrate and method of determining whether substrate treatment process is normal
SEMES CO LTD0 citations52
US11387127B2Jul 12, 2022
Substrate treating apparatus and substrate transfer apparatus
SEMES CO LTD0 citations51
US11972939B2Apr 30, 2024
Method and apparatus for treating substrate
SEMES CO LTD0 citations49
US12236574B2Feb 25, 2025
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations47
US11745291B2Sep 5, 2023
Apparatus and method for processing substrate
SEMES CO LTD0 citations46
US10757331B2Aug 25, 2020
Camera posture estimation method and substrate processing apparatus
SEMES CO LTD0 citations41