Inventor
NAGTEGAAL THEODORUS MARCUS
NL2 patents
Patents
2 patentsUS11860554B2Jan 2, 2024
Object positioner, method for correcting the shape of an object, lithographic apparatus, object inspection apparatus, device manufacturing method
ASML NETHERLANDS BV0 citations53
US11556064B2Jan 17, 2023
Stage apparatus and method for calibrating an object loading process
ASML NETHERLANDS BV0 citations40