Inventor

BRENNAN BRADLEY J

US2 patents

Patents

2 patents

US11111435B2Sep 7, 2021

Tungsten chemical mechanical planarization (CMP) with low dishing and low erosion topography

VERSUM MAT US LLC2 citations66

US11884859B2Jan 30, 2024

Tungsten chemical mechanical planarization (CMP) with low dishing and low erosion topography

VERSUM MAT US LLC0 citations56