Inventor

LINDQUIST JOHN M

US3 patents

Patents

3 patents

US5188705AFeb 23, 1993

Method of semiconductor device manufacture

FEI CO145 citations96

US5541411AJul 30, 1996

Image-to-image registration focused ion beam system

FEI CO63 citations91

US5376791ADec 27, 1994

Secondary ion mass spectometry system

FEI CO56 citations91