Inventor
CHEN FEI-FAN
TW6 patents
⚠️ This page may combine multiple inventors who share the name “CHEN FEI-FAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS10008367B2Jun 26, 2018
Gas diffuser unit, process chamber and wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations71
US10011532B2Jul 3, 2018
Remote plasma system and method
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations70
US12394602B2Aug 19, 2025
Wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US10741366B2Aug 11, 2020
Process chamber and wafer processing method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50