Inventor
NAKAO WATARU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “NAKAO WATARU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CIRCLE PROMOTION SCIENCE & ENG
2 patentsUS6744076B2Jun 1, 2004
Single crystalline aluminum nitride film, method of forming the same, base substrate for group III element nitride film, light emitting device and surface acoustic wave device
CIRCLE PROMOTION SCIENCE & ENG38 citations90
US7220314B2May 22, 2007
Single crystalline aluminum nitride film, method of forming the same, base substrate for group III element nitride film, light emitting device and surface acoustic wave device
CIRCLE PROMOTION SCIENCE & ENG11 citations82