Inventor
PATRIN JOHN C
US3 patents
Patents
3 patentsUS5961732AOct 5, 1999
Treating substrates by producing and controlling a cryogenic aerosol
FSI INT INC92 citations95
US6251195B1Jun 26, 2001
Method for transferring a microelectronic device to and from a processing chamber
FSI INT INC43 citations90
US6578369B2Jun 17, 2003
Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices
FSI INT INC23 citations86