Inventor
MERTENS JEROEN JOHANNES SOPHIA
NL29 patents
⚠️ This page may combine multiple inventors who share the name “MERTENS JEROEN JOHANNES SOPHIA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
27 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7593093B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV67 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7075616B2Jul 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV366 citations99
US7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7224436B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV110 citations98
US7733459B2Jun 8, 2010
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV66 citations97
US7411653B2Aug 12, 2008
Lithographic apparatus
ASML NETHERLANDS BV49 citations96
US7057702B2Jun 6, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV89 citations96
US7602470B2Oct 13, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV20 citations95
US7304715B2Dec 4, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV52 citations94
US7196770B2Mar 27, 2007
Prewetting of substrate before immersion exposure
ASML NETHERLANDS BV18 citations93
US7227619B2Jun 5, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations92
US7532310B2May 12, 2009
Apparatus, method for supporting and/or thermally conditioning a substrate, a support table, and a chuck
ASML NETHERLANDS BV28 citations91
US7379155B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations90
US7468779B2Dec 23, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations84
US7196768B2Mar 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations83
US7365827B2Apr 29, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations81
US7161663B2Jan 9, 2007
Lithographic apparatus
ASML NETHERLANDS BV7 citations74
US7161654B2Jan 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US7034917B2Apr 25, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations74
US7633073B2Dec 15, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations72
US7379159B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations63
US7375796B2May 20, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US7248334B2Jul 24, 2007
Sensor shield
ASML NETHERLANDS BV2 citations63
US6847430B2Jan 25, 2005
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations52