Inventor
DONDERS SJOERD NICOLAAS LAMBER
NL27 patents
Patents
27 patentsUS7593092B2Sep 22, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV60 citations99
US7213963B2May 8, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV196 citations99
US7199858B2Apr 3, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV409 citations99
US7075616B2Jul 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV366 citations99
US7372541B2May 13, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV74 citations98
US7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US7224436B2May 29, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV110 citations98
US7119874B2Oct 10, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV143 citations98
US7110081B2Sep 19, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV128 citations98
US6781673B2Aug 24, 2004
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV56 citations94
US7196770B2Mar 27, 2007
Prewetting of substrate before immersion exposure
ASML NETHERLANDS BV18 citations93
US7411654B2Aug 12, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations92
US7184122B2Feb 27, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV15 citations92
US7078715B2Jul 18, 2006
Lithographic apparatus and apparatus adjustment method
ASML NETHERLANDS BV24 citations91
US7379155B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV28 citations90
US7468779B2Dec 23, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV12 citations84
US6956222B2Oct 18, 2005
Lithographic apparatus and method of manufacturing a device
ASML NETHERLANDS BV16 citations84
US7307696B2Dec 11, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV8 citations74
US7161654B2Jan 9, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations74
US7161663B2Jan 9, 2007
Lithographic apparatus
ASML NETHERLANDS BV7 citations74
US7034917B2Apr 25, 2006
Lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations74
US7633073B2Dec 15, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations72
US7016019B2Mar 21, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV10 citations71
US6856376B2Feb 15, 2005
Lithographic apparatus, apparatus cleaning method, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV7 citations71
US7379159B2May 27, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV5 citations63
US7375796B2May 20, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV2 citations63
US7248334B2Jul 24, 2007
Sensor shield
ASML NETHERLANDS BV2 citations63