P

Inventor

MONTCALM CLAUDE

US10 patents
⚠️ This page may combine multiple inventors who share the name “MONTCALM CLAUDE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

UNIV CALIFORNIA

5 patents
US5958605ASep 28, 1999

Passivating overcoat bilayer for multilayer reflective coatings for extreme ultraviolet lithography

UNIV CALIFORNIA115 citations97
US6134049AOct 17, 2000

Method to adjust multilayer film stress induced deformation of optics

UNIV CALIFORNIA71 citations95
US6634760B2Oct 21, 2003

Low-cost method for producing extreme ultraviolet lithography optics

UNIV CALIFORNIA21 citations92
US6110607AAug 29, 2000

High reflectance-low stress Mo-Si multilayer reflective coatings

UNIV CALIFORNIA24 citations92
US6309705B1Oct 30, 2001

Process for fabricating high reflectance-low stress Mo—Si multilayer reflective coatings

UNIV CALIFORNIA14 citations73

(unassigned)

2 patents
US6524449B1Feb 25, 2003

Method and system for producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients

21 citations91
US6425988B1Jul 30, 2002

Method and system using power modulation for maskless vapor deposition of spatially graded thin film and multilayer coatings with atomic-level precision and accuracy

26 citations89

UNVIERSITY OF CALIFORNIA

1 patent
US6011646AJan 4, 2000

Method to adjust multilayer film stress induced deformation of optics

UNVIERSITY OF CALIFORNIA103 citations96

EUV LLC

1 patent
US6844272B2Jan 18, 2005

Correction of localized shape errors on optical surfaces by altering the localized density of surface or near-surface layers

EUV LLC40 citations92

USA

1 patent
US6668207B1Dec 23, 2003

Method and system using power modulation and velocity modulation producing sputtered thin films with sub-angstrom thickness uniformity or custom thickness gradients

USA24 citations87