Inventor
KIM JIN GYO
KR2 patents
Patents
2 patentsUS12552962B2Feb 17, 2026
CMP slurry composition for polishing tungsten pattern wafer and method of polishing tungsten pattern wafer using the same
SAMSUNG SDI CO LTD0 citations56
US10020185B2Jul 10, 2018
Composition for forming silica layer, silica layer, and electronic device
SAMSUNG SDI CO LTD0 citations47