Inventor
EGAWA MINORU
JP2 patents
Patents
2 patentsUS10220107B2Mar 5, 2019
Plasma generating method including generating first plasma without supplying first gas in liquid and generating second plasma in first gas, and plasma generating apparatus
PANASONIC IP MAN CO LTD0 citations43
US10446375B2Oct 15, 2019
Liquid processing apparatus including container, first and second electrodes, insulator surrounding at least part of side face of the first electrode, gas supply device, metallic member surrounding part of side face of the first electrode, and power source
PANASONIC IP MAN CO LTD0 citations35