P

Inventor

IZAWA HISAO

JP6 patents
⚠️ This page may combine multiple inventors who share the name “IZAWA HISAO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NIPPON KOGAKU KK

4 patents
US4636626AJan 13, 1987

Apparatus for aligning mask and wafer used in semiconductor circuit element fabrication

NIPPON KOGAKU KK38 citations92
US4598242AJul 1, 1986

Mask feed method and apparatus for exposure replicate systems

NIPPON KOGAKU KK15 citations72
US4685805AAug 11, 1987

Small gap measuring apparatus

NIPPON KOGAKU KK1 citations48
US4537501AAug 27, 1985

Apparatus for the attitude control of plate-form body

NIPPON KOGAKU KK0 citations40

NIKON CORP

2 patents
US5539521AJul 23, 1996

Method of and apparatus for measuring pattern positions

NIKON CORP28 citations88
US5459577AOct 17, 1995

Method of and apparatus for measuring pattern positions

NIKON CORP15 citations71