Inventor
HAMAGUCHI ISAO
JP5 patents
Patents
5 patentsUS7204887B2Apr 17, 2007
Wafer holding, wafer support member, wafer boat and heat treatment furnace
NIPPON STEEL CORP581 citations98
US5918151AJun 29, 1999
Method of manufacturing a semiconductor substrate and an apparatus for manufacturing the same
NIPPON STEEL CORP22 citations91
US6617034B1Sep 9, 2003
SOI substrate and method for production thereof
NIPPON STEEL CORP16 citations82
US7084459B2Aug 1, 2006
SOI substrate
NIPPON STEEL CORP10 citations72
US5534446AJul 9, 1996
Process for producing buried insulator layer in semiconductor substrate
NIPPON STEEL CORP12 citations69