P

Inventor

SUGIMOTO KENJI

JP52 patents
⚠️ This page may combine multiple inventors who share the name “SUGIMOTO KENJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

DAINIPPON SCREEN MFG

22 patents
US5678116AOct 14, 1997

Method and apparatus for drying a substrate having a resist film with a miniaturized pattern

DAINIPPON SCREEN MFG185 citations99
US6893171B2May 17, 2005

Substrate treating apparatus

DAINIPPON SCREEN MFG131 citations98
US5762709AJun 9, 1998

Substrate spin coating apparatus

DAINIPPON SCREEN MFG76 citations96
US5677000AOct 14, 1997

Substrate spin treating method and apparatus

DAINIPPON SCREEN MFG62 citations96
US5180431AJan 19, 1993

Apparatus for applying liquid agent on surface of rotating substrate

DAINIPPON SCREEN MFG87 citations96
US4870923AOct 3, 1989

Apparatus for treating the surfaces of wafers

DAINIPPON SCREEN MFG114 citations96
US6558053B2May 6, 2003

Substrate processing apparatus

DAINIPPON SCREEN MFG63 citations95
US5555234ASep 10, 1996

Developing method and apparatus

DAINIPPON SCREEN MFG55 citations93
US4987687AJan 29, 1991

Rotary wafer drier

DAINIPPON SCREEN MFG42 citations93
US6832863B2Dec 21, 2004

Substrate treating apparatus and method

DAINIPPON SCREEN MFG41 citations92
US6000862ADec 14, 1999

Substrate developing method and apparatus

DAINIPPON SCREEN MFG31 citations92
US5792259AAug 11, 1998

Substrate processing apparatus and air supply method in substrate processing apparatus

DAINIPPON SCREEN MFG21 citations92
US5788773AAug 4, 1998

Substrate spin treating method and apparatus

DAINIPPON SCREEN MFG29 citations92
US5647083AJul 15, 1997

Apparatus for cleaning substrates and methods for attaching/detaching and cleaning brushes of such apparatus

DAINIPPON SCREEN MFG41 citations92
US5639301AJun 17, 1997

Processing apparatus having parts for thermal and non-thermal treatment of substrates

DAINIPPON SCREEN MFG42 citations92
US5191908AMar 9, 1993

Dipping type surface treatment apparatus

DAINIPPON SCREEN MFG46 citations92
US7364376B2Apr 29, 2008

Substrate processing apparatus

DAINIPPON SCREEN MFG14 citations84
US5656088AAug 12, 1997

Apparatus for dipping substrates in processing fluid

DAINIPPON SCREEN MFG11 citations71
US6963789B2Nov 8, 2005

Substrate processing apparatus control system and substrate processing apparatus

DAINIPPON SCREEN MFG8 citations68
US5976198ANov 2, 1999

Substrate transfer and bath apparatus

DAINIPPON SCREEN MFG14 citations67
US7922405B2Apr 12, 2011

Developing apparatus and developing method

DAINIPPON SCREEN MFG2 citations63
US7105074B2Sep 12, 2006

Substrate treating method and apparatus

DAINIPPON SCREEN MFG5 citations62

CITIZEN WATCH CO LTD

8 patents

MITSUBISHI CHEM CORP

3 patents

TAISEI CORP

3 patents

GREE INC

3 patents

HITACHI LTD

2 patents

TOSHIBA KK

1 patent

TOHO RAYON KK

1 patent

SHOWA HIGHPOLYMER

1 patent

ISHIZUKA SHINICHI

1 patent

IBM

1 patent

NISSHO KK

1 patent

PIONEER CORP

1 patent

DAIKIN IND LTD

1 patent

KYOCERA CORP

1 patent

Showing the top 50 of 52 patents by PatentIndex Score.