Inventor
SORRELL FURMAN Y
US4 patents
⚠️ This page may combine multiple inventors who share the name “SORRELL FURMAN Y”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNIV NORTH CAROLINA STATE
3 patentsUS5418885AMay 23, 1995
Three-zone rapid thermal processing system utilizing wafer edge heating means
UNIV NORTH CAROLINA STATE92 citations93
US5253324AOct 12, 1993
Conical rapid thermal processing apparatus
UNIV NORTH CAROLINA STATE30 citations89
US5155337AOct 13, 1992
Method and apparatus for controlling rapid thermal processing systems
UNIV NORTH CAROLINA STATE42 citations89