Inventor

SAKAI FUMIO

JP16 patents

⚠️ This page may combine multiple inventors who share the name “SAKAI FUMIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON KK

7 patents

US4814829AMar 21, 1989

Projection exposure apparatus

CANON KK162 citations98

US5751404AMay 12, 1998

Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates

CANON KK54 citations96

US4952060AAug 28, 1990

Alignment method and a projection exposure apparatus using the same

CANON KK78 citations96

US4737824AApr 12, 1988

Surface shape controlling device

CANON KK91 citations96

US5925887AJul 20, 1999

Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same

CANON KK50 citations92

US5734462AMar 31, 1998

Exposure apparatus and exposure method

CANON KK7 citations73

US10144156B2Dec 4, 2018

Imprint apparatus, imprint method, and method for producing device

CANON KK0 citations52

NIPPON KAYAKU KK

4 patents

US6028220AFeb 22, 2000

Producing acrolein and acrylic acid using a supported dual activity molybdenum, iron, and bismuth based catalyst in a fixed bed multitubular reactor

NIPPON KAYAKU KK69 citations95

US5959143ASep 28, 1999

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

2 patents

US5917682AJun 29, 1999

Magnetic head and manufacturing method therefor

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD3 citations62

US5774310AJun 30, 1998

Magnetic head and magnetic recording apparatus which prevent generation of a false magnetic head tending to disturb a previously formed magnetic recording track

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD0 citations30

MATSUMOTO HIDEKI

1 patent

US9387607B2Jul 12, 2016

Imprint apparatus, imprint method, and method for producing device

MATSUMOTO HIDEKI5 citations83

WAKABAYASHI KOHEI

1 patent

US9880463B2Jan 30, 2018

Imprint method, imprint apparatus, and article manufacturing method

WAKABAYASHI KOHEI3 citations68

SUDO ATSUSHI

1 patent

US8586785B2Nov 19, 2013

Process for producing catalyst for methacrylic acid production and process for producing methacrylic acid

SUDO ATSUSHI0 citations50

SAKAI FUMIO

CANON KK

Projection exposure apparatus

Exposure apparatus and method wherein alignment is carried out by comparing marks which are incident on both reticle stage and wafer stage reference plates

Alignment method and a projection exposure apparatus using the same

Surface shape controlling device

Projection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the same

Exposure apparatus and exposure method

Imprint apparatus, imprint method, and method for producing device

NIPPON KAYAKU KK

Producing acrolein and acrylic acid using a supported dual activity molybdenum, iron, and bismuth based catalyst in a fixed bed multitubular reactor

Catalysts and process for the preparation thereof

Catalyst and process for producing unsaturated aldehyde and unsaturated acid

Production of methacrolein and oxidation catalyst used therefor

MATSUSHITA ELECTRIC INDUSTRIAL CO LTD

Magnetic head and manufacturing method therefor

Magnetic head and magnetic recording apparatus which prevent generation of a false magnetic head tending to disturb a previously formed magnetic recording track

MATSUMOTO HIDEKI

Imprint apparatus, imprint method, and method for producing device

WAKABAYASHI KOHEI

Imprint method, imprint apparatus, and article manufacturing method

SUDO ATSUSHI

Process for producing catalyst for methacrylic acid production and process for producing methacrylic acid