Inventor
ISOHATA JUNJI
JP24 patents
Patents
24 patentsUS4737824AApr 12, 1988
Surface shape controlling device
CANON KK91 citations96
US4708465ANov 24, 1987
Exposure apparatus
CANON KK56 citations96
US3982627ASep 28, 1976
Automatic wafer orienting apparatus
CANON KK73 citations96
US4878086AOct 31, 1989
Flat panel display device and manufacturing of the same
CANON KK78 citations95
US7193684B2Mar 20, 2007
Projection exposure mask, projection exposure apparatus, and projection exposure method
CANON KK19 citations92
US7030962B2Apr 18, 2006
Projection exposure mask, projection exposure apparatus, and projection exposure method
CANON KK24 citations92
US5359389AOct 25, 1994
Exposure apparatus including two illuminating systems and exposure process using the same
CANON KK35 citations92
US4814830AMar 21, 1989
Flat panel display device and manufacturing of the same
CANON KK46 citations92
US4749867AJun 7, 1988
Exposure apparatus
CANON KK46 citations92
US4748477AMay 31, 1988
Exposure apparatus
CANON KK40 citations92
US4708466ANov 24, 1987
Exposure apparatus
CANON KK35 citations92
US4676630AJun 30, 1987
Exposure apparatus
CANON KK45 citations92
US4496239AJan 29, 1985
Projection exposure apparatus
CANON KK46 citations92
US4407627AOct 4, 1983
Automatic wafer orienting apparatus
CANON KK35 citations92
US7158210B2Jan 2, 2007
Projection exposure apparatus
CANON KK11 citations84
US4998134AMar 5, 1991
Exposure apparatus
CANON KK21 citations82
US4864360ASep 5, 1989
Exposure apparatus
CANON KK21 citations82
US4563820AJan 14, 1986
Aligning system
CANON KK9 citations74
US4422754ADec 27, 1983
Projection-printing apparatus
CANON KK9 citations74
US4370054AJan 25, 1983
Projection exposure apparatus
CANON KK16 citations74
US5150152ASep 22, 1992
Exposure apparatus including device for determining movement of an object
CANON KK17 citations73
US4768064AAug 30, 1988
Conveyor device for alignment
CANON KK8 citations73
US4588288AMay 13, 1986
Static pressure bearing and transport device utilizing the same
CANON KK8 citations73
US4601560AJul 22, 1986
Focus adjustment in an alignment and exposure apparatus
CANON KK17 citations71