Inventor
TOTSUKA MASAO
JP9 patents
Patents
9 patentsUS4814829AMar 21, 1989
Projection exposure apparatus
CANON KK162 citations98
US4878086AOct 31, 1989
Flat panel display device and manufacturing of the same
CANON KK78 citations95
US4834540AMay 30, 1989
Projection exposure apparatus
CANON KK44 citations92
US4814830AMar 21, 1989
Flat panel display device and manufacturing of the same
CANON KK46 citations92
US4315201AFeb 9, 1982
Alignment apparatus for mask and wafer used in manufacturing semiconductor circuit elements
CANON KK24 citations82
US4659228AApr 21, 1987
Aligning apparatus
CANON KK7 citations73
US4651009AMar 17, 1987
Contact exposure apparatus
CANON KK12 citations72
US4576475AMar 18, 1986
Contacting method and apparatus in contact copying
CANON KK15 citations72
US4611122ASep 9, 1986
Signal detection apparatus with plural elongate beams corresponding
CANON KK10 citations70