Inventor
JUCHA RHETT B
US30 patents
⚠️ This page may combine multiple inventors who share the name “JUCHA RHETT B”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
29 patentsUS4886570ADec 12, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC160 citations99
US4867841ASep 19, 1989
Method for etch of polysilicon film
TEXAS INSTRUMENTS INC141 citations99
US4828649AMay 9, 1989
Method for etching an aluminum film doped with silicon
TEXAS INSTRUMENTS INC176 citations99
US4820377AApr 11, 1989
Method for cleanup processing chamber and vacuum process module
TEXAS INSTRUMENTS INC334 citations99
US4911103AMar 27, 1990
Processing apparatus and method
TEXAS INSTRUMENTS INC167 citations98
US5248636ASep 28, 1993
Processing method using both a remotely generated plasma and an in-situ plasma with UV irradiation
TEXAS INSTRUMENTS INC86 citations96
US5138973AAug 18, 1992
Wafer processing apparatus having independently controllable energy sources
TEXAS INSTRUMENTS INC108 citations96
US4891488AJan 2, 1990
Processing apparatus and method
TEXAS INSTRUMENTS INC57 citations96
US4878994ANov 7, 1989
Method for etching titanium nitride local interconnects
TEXAS INSTRUMENTS INC124 citations96
US4842686AJun 27, 1989
Wafer processing apparatus and method
TEXAS INSTRUMENTS INC54 citations96
US4838990AJun 13, 1989
Method for plasma etching tungsten
TEXAS INSTRUMENTS INC102 citations96
US4822450AApr 18, 1989
Processing apparatus and method
TEXAS INSTRUMENTS INC56 citations96
US4915777AApr 10, 1990
Method for etching tungsten
TEXAS INSTRUMENTS INC25 citations93
US4874723AOct 17, 1989
Selective etching of tungsten by remote and in situ plasma generation
TEXAS INSTRUMENTS INC27 citations92
US4849067AJul 18, 1989
Method for etching tungsten
TEXAS INSTRUMENTS INC27 citations92
US4502915AMar 5, 1985
Two-step plasma process for selective anisotropic etching of polycrystalline silicon without leaving residue
TEXAS INSTRUMENTS INC30 citations92
US4988644AJan 29, 1991
Method for etching semiconductor materials using a remote plasma generator
TEXAS INSTRUMENTS INC48 citations91
US4758305AJul 19, 1988
Contact etch method
TEXAS INSTRUMENTS INC29 citations91
US4659413AApr 21, 1987
Automated single slice cassette load lock plasma reactor
TEXAS INSTRUMENTS INC31 citations91
US4997520AMar 5, 1991
Method for etching tungsten
TEXAS INSTRUMENTS INC25 citations89
US4891087AJan 2, 1990
Isolation substrate ring for plasma reactor
TEXAS INSTRUMENTS INC39 citations89
US4923562AMay 8, 1990
Processing of etching refractory metals
TEXAS INSTRUMENTS INC22 citations82
US4855016AAug 8, 1989
Method for etching aluminum film doped with copper
TEXAS INSTRUMENTS INC21 citations82
US4842676AJun 27, 1989
Process for etch of tungsten
TEXAS INSTRUMENTS INC19 citations82
US4842687AJun 27, 1989
Method for etching tungsten
TEXAS INSTRUMENTS INC14 citations74
US4838984AJun 13, 1989
Method for etching films of mercury-cadmium-telluride and zinc sulfid
TEXAS INSTRUMENTS INC11 citations74
US4685999AAug 11, 1987
Apparatus for plasma assisted etching
TEXAS INSTRUMENTS INC9 citations74
US4863558ASep 5, 1989
Method for etching tungsten
TEXAS INSTRUMENTS INC10 citations73
US4849068AJul 18, 1989
Apparatus and method for plasma-assisted etching
TEXAS INSTRUMENTS INC2 citations63