Inventor

JOO CHAN-SUL

SG3 patents

Patents

3 patents

US11680321B2Jun 20, 2023

Apparatus and method for semiconductor fabrication

XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations57

US11572624B2Feb 7, 2023

Apparatus and method for semiconductor fabrication

XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations57

US11286565B2Mar 29, 2022

Apparatus and method for semiconductor fabrication

XIA TAI XIN SEMICONDUCTOR QING DAO LTD0 citations57