Inventor

RENNO MARKUS

DE2 patents

⚠️ This page may combine multiple inventors who share the name “RENNO MARKUS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

1 patent

US7029803B2Apr 18, 2006

Attenuating phase shift mask blank and photomask

IBM45 citations88

SCHOTT AG

1 patent

US7517617B2Apr 14, 2009

Mask blank for use in EUV lithography and method for its production

SCHOTT AG6 citations56