Inventor

ELAMRAWI KHALED A

US2 patents

Patents

2 patents

US7172960B2Feb 6, 2007

Multi-layer film stack for extinction of substrate reflections during patterning

INTEL CORP4 citations55

US7291552B2Nov 6, 2007

Multi-layer film stack for extinction of substrate reflections during patterning

INTEL CORP0 citations45