Inventor

BERTSCH KEVIN

US3 patents

⚠️ This page may combine multiple inventors who share the name “BERTSCH KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOVELLUS SYSTEMS INC

2 patents

US7811153B1Oct 12, 2010

High throughput servo load cup with integrated wet chemistry delivery

NOVELLUS SYSTEMS INC11 citations79

US7229339B2Jun 12, 2007

CMP apparatus and method

NOVELLUS SYSTEMS INC12 citations77

HARDIKAR VISHWAS

1 patent

US8261758B2Sep 11, 2012

Apparatus and method for cleaning and removing liquids from front and back sides of a rotating workpiece

HARDIKAR VISHWAS0 citations34