Inventor

LAFFERTY NEAL V

US2 patents

⚠️ This page may combine multiple inventors who share the name “LAFFERTY NEAL V”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

GLOBALFOUNDRIES INC

1 patent

US9335626B2May 10, 2016

Mask design and decomposition for sidewall image transfer

GLOBALFOUNDRIES INC2 citations57

CHEN SHYNG-TSONG

1 patent

US8716133B2May 6, 2014

Three photomask sidewall image transfer method

CHEN SHYNG-TSONG1 citations48