Inventor
HIGOMURA MAKOTO
JP9 patents
Patents
9 patentsUS5524131AJun 4, 1996
Alignment apparatus and SOR x-ray exposure apparatus having same
CANON KK46 citations95
US5114234AMay 19, 1992
Stage positioning control method and apparatus
CANON KK100 citations95
US4744675AMay 17, 1988
Moving mechanism
CANON KK72 citations95
US4710865ADec 1, 1987
Control system for positioning an object using switching from a speed control mode to a position control mode with adjustable brain
CANON KK55 citations95
US4993696AFeb 19, 1991
Movable stage mechanism
CANON KK94 citations94
US5822389AOct 13, 1998
Alignment apparatus and SOR X-ray exposure apparatus having same
CANON KK36 citations92
US4810941AMar 7, 1989
Control system for a servomotor
CANON KK52 citations92
US4716731AJan 5, 1988
Actuator of shape memory effect material
CANON KK50 citations92
US4888536ADec 19, 1989
Device for controlling positioning of an object
CANON KK18 citations73