Inventor
KARIYA TAKAO
JP34 patents
Patents
34 patentsUS5153898AOct 6, 1992
X-ray reduction projection exposure system of reflection type
CANON KK158 citations99
US5577552ANov 26, 1996
Temperature controlling device for mask and wafer holders
CANON KK95 citations96
US5498501AMar 12, 1996
Exposure method
CANON KK59 citations96
US5182615AJan 26, 1993
Exposure apparatus
CANON KK79 citations96
US5026239AJun 25, 1991
Mask cassette and mask cassette loading device
CANON KK81 citations96
US5524131AJun 4, 1996
Alignment apparatus and SOR x-ray exposure apparatus having same
CANON KK46 citations95
US4993696AFeb 19, 1991
Movable stage mechanism
CANON KK94 citations94
US5566922AOct 22, 1996
Gate valve device
CANON KK29 citations93
US5317615AMay 31, 1994
Exposure apparatus
CANON KK22 citations93
US5285488AFeb 8, 1994
Exposure apparatus
CANON KK33 citations93
US5168512ADec 1, 1992
Method of manufacture of semiconductor devices
CANON KK26 citations93
US5150391ASep 22, 1992
Exposure apparatus
CANON KK28 citations93
US5128975AJul 7, 1992
X-ray exposure system
CANON KK28 citations93
US5822389AOct 13, 1998
Alignment apparatus and SOR X-ray exposure apparatus having same
CANON KK36 citations92
US5377251ADec 27, 1994
Exposure apparatus
CANON KK26 citations92
US5356686AOct 18, 1994
X-ray mask structure
CANON KK22 citations92
US5172402ADec 15, 1992
Exposure apparatus
CANON KK33 citations92
US5164974ANov 17, 1992
X-ray exposure apparatus
CANON KK34 citations92
US5112133AMay 12, 1992
Alignment system
CANON KK42 citations92
US5066131ANov 19, 1991
Stage mechanism
CANON KK25 citations92
US4963921AOct 16, 1990
Device for holding a mask
CANON KK48 citations92
US4785187ANov 15, 1988
Alignment device
CANON KK25 citations92
US4667110AMay 19, 1987
Apparatus for holding an object by use of electrostatic attracting force
CANON KK25 citations92
US5160961ANov 3, 1992
Substrate holding device
CANON KK19 citations82
US5131022AJul 14, 1992
Exposure method and apparatus
CANON KK20 citations82
US4830498AMay 16, 1989
Position detecting device
CANON KK23 citations82
US5641264AJun 24, 1997
Substrate conveying device and method of controlling the same
CANON KK9 citations74
US5390227AFeb 14, 1995
Exposure apparatus
CANON KK12 citations74
US5277539AJan 11, 1994
Substrate conveying apparatus
CANON KK14 citations74
US5267292ANov 30, 1993
X-ray exposure apparatus
CANON KK16 citations74
US5226523AJul 13, 1993
Conveying apparatus and method of controlling the same
CANON KK8 citations74
US5172403ADec 15, 1992
X-ray exposure apparatus
CANON KK19 citations74
US5161176ANov 3, 1992
Exposure apparatus
CANON KK8 citations74
US5687947ANov 18, 1997
Mounting method
CANON KK8 citations73